Delineation of pn junctions by scanning tunneling microscopy/ spectroscopy in air and ultrahigh vacuum

Autor: R. M. Silver, W. F. Tseng, J. A. Dagata
Rok vydání: 1995
Předmět:
Zdroj: Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. 13:1705-1708
ISSN: 1520-8559
0734-2101
DOI: 10.1116/1.579755
Popis: Lateral dopant profiling of cleaved, passivated abrupt GaAs pn junctions using scanning tunneling microscopy/spectroscopy is demonstrated both in ultrahigh vacuum and air. A combination of forward‐ and reverse‐bias imaging and position‐dependent tunneling spectroscopy makes it possible to delineate the metallurgical junction location of abrupt asymmetric n+p and symmetric n+p+ junctions. The experimental results are shown to be consistent with simulations based on the metal–insulator–semiconductor band‐bending model when surface states and bulk transport through the pn junction are properly taken into account in the calculations.
Databáze: OpenAIRE