A $1\times 8$ Splitter Chip With Integrated Fiber Grooves for Reliable Passive Alignment of Fiber Arrays
Autor: | Jin-Kyoung Oh, Sang-Wan Ryu, Hyung Jong Lee, Jeong Hoon Cho |
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Rok vydání: | 2015 |
Předmět: |
Materials science
Optical fiber business.industry Waveguide (optics) Atomic and Molecular Physics and Optics Electronic Optical and Magnetic Materials law.invention Core (optical fiber) Optics Etching (microfabrication) law Splitter Fiber optic splitter Insertion loss Wafer Electrical and Electronic Engineering business |
Zdroj: | IEEE Photonics Technology Letters. 27:249-252 |
ISSN: | 1941-0174 1041-1135 |
Popis: | A $1\times 8$ optical splitter with integrated fiber-positioning grooves was fabricated by simultaneous formation of the waveguide cores and grooves. The waveguide cores were realized by intaglio etching of a fused-silica wafer and subsequent core filling, followed by the deposition of an overcladding layer. Fiber-positioning grooves were then formed by wet etching the silica wafer with the use of a highly selective SiN x mask. Passive alignment was accomplished by guiding the fibers into the grooves, which is favorable for automated mass production of splitter modules. The resulting $1\,\times \,8$ splitter module exhibited a small insertion loss of 59 dB. It yielded good reliability during a damp heat test at 85 °C and 85% humidity, and the insertion loss varied by |
Databáze: | OpenAIRE |
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