Principles of the Construction and Computer Simulation of a Source of Homogeneous and Heterogeneous Cluster Ions
| Autor: | A. A. Lozovan, A. D. Bekkerman, S. F. Belykh, Alexander Tolstogouzov, Dejun Fu |
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| Rok vydání: | 2018 |
| Předmět: |
Materials science
010401 analytical chemistry 01 natural sciences Molecular physics Ion source 0104 chemical sciences Surfaces Coatings and Films Ion Physics::Plasma Physics Homogeneous 0103 physical sciences Cluster (physics) Thin film Heterogeneous cluster 010306 general physics Hardware_REGISTER-TRANSFER-LEVELIMPLEMENTATION Ion sputtering |
| Zdroj: | Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques. 12:33-37 |
| ISSN: | 1819-7094 1027-4510 |
| DOI: | 10.1134/s1027451018010056 |
| Popis: | The principles of constructing a sputtering-type high-current source of homogeneous and heterogeneous cluster ions are comprehensively analyzed. The results of analysis are used to perform computer simulation of the given source. The ion-optical scheme and structural model of a new cluster ion source are developed. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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