| Autor: |
Lee Johnson, Melissa Zaverton, Tom D. Milster, Chris Summitt, Yuzuru Takashima, Tao Ge, Sunglin Wang |
| Rok vydání: |
2015 |
| Předmět: |
|
| Zdroj: |
SPIE Proceedings. |
| ISSN: |
0277-786X |
| Popis: |
We have developed a hybrid lithography process necessary to fabricate a vertical optical coupler and an array of waveguide structures using the same buffer coat material on a single substrate. A virtual vernier scale built into the process enables precise alignment of both structures. |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
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