Electrical breakdown in ZnS:Mn films grown by rf-magnetron sputtering

Autor: V. A. Mukhachev, P. E. Troyan, A. A. Zhigal'skii
Rok vydání: 1993
Předmět:
Zdroj: Russian Physics Journal. 36:221-223
ISSN: 1573-9228
1064-8887
Popis: We have studied the electrical breakdown field strength Ebr of ZnS films doped with Mn(ZnS:Mn), produced by rf magnetron sputtering, as a function of film thickness d in the system Al-ZnS:Mn-Al. Electron-microscope studies have shown that breakdown is initiated under inhomogeneous field conditions imposed both by the roughness of the aluminum electrode and by the polycrystallinity of the ZnS:Mn film. An observed increase in Ebr as d is reduced below 0.7 µm, with no polarity effect in breakdown under dc field conditions, is explained in terms of an electron-thermal breakdown model.
Databáze: OpenAIRE