Development of a High-Resolution Touch Trigger Probe Based on an Optical Lever for Measuring Micro Components
| Autor: | Xiao-Yu Feng, Peng Xu, Rui-Jun Li, Ying-Jun Lei, Lian-Sheng Zhang, Biao Wang, Qiang-Xian Huang |
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| Rok vydání: | 2022 |
| Předmět: | |
| Zdroj: | IEEE Sensors Journal. 22:6466-6475 |
| ISSN: | 2379-9153 1530-437X |
| DOI: | 10.1109/jsen.2022.3155636 |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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