Characteristics and Integration Challenges of FinFET-based Devices for (Sub-)22nm Technology Nodes Circuit Applications
| Autor: | S. Biesemans, Blandine Duriez, Georgios Vellianitis, Stephan Brus, R. J. P. Lander, Bartlomiej Jan Pawlak, T. Merelle, T. Y. Hoffmann, Philippe Absil, A. De Keersgieter, A. Veloso, Rita Rooyackers, Nadine Collaert, Ray Duffy, M.J.H. van Dal, M. Jurczak, L Witters, Augusto Redolfi |
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| Rok vydání: | 2009 |
| Předmět: | |
| Zdroj: | Extended Abstracts of the 2009 International Conference on Solid State Devices and Materials. |
| DOI: | 10.7567/ssdm.2009.c-7-1 |
| Databáze: | OpenAIRE |
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