Sensitivity improvement of MEMS-based tilt sensor using air medium

Autor:	Ho Jung, June Kyoo Lee, Ju Chan Choi, Seong Ho Kong, Dae Woong Jung
Rok vydání:	2009
Předmět:	Convection Microelectromechanical systems Reliability (semiconductor) Materials science Air volume Tilt sensor Acoustics Electro-optical sensor Electronic engineering Sensitivity (control systems) Durability Physics::Atmospheric and Oceanic Physics
Zdroj:	2009 IEEE Sensors.
DOI:	10.1109/icsens.2009.5398205
Popis:	A convection based multi-axis tilt sensor using air medium has many advantages, such as small size, simple structure, low cost, reliability and durability. In this paper, a study focused on optimizing two different parameters, the geometry of temperature sensors and air volume of encapsulated micro-chamber filled with air medium, is mainly reported.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::59674b8617889330a66beae72a4c2991 https://doi.org/10.1109/icsens.2009.5398205 Zobrazit plný text záznamu