Modeling of fast neutral atoms flow generation in channel rays of glow discharge
| Autor: | Yu. A. Obod, A S Sigov, A I Kuzmichev, O. D. Volpian |
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| Rok vydání: | 2018 |
| Předmět: |
History
Glow discharge Materials science Energetic neutral atom 02 engineering and technology Dielectric 021001 nanoscience & nanotechnology 01 natural sciences Cathode Computer Science Applications Education law.invention Ion 010309 optics Physics::Plasma Physics law 0103 physical sciences Atom Physics::Accelerator Physics Atomic physics 0210 nano-technology Voltage drop Beam (structure) |
| Zdroj: | Journal of Physics: Conference Series. 1121:012034 |
| ISSN: | 1742-6596 1742-6588 |
| DOI: | 10.1088/1742-6596/1121/1/012034 |
| Popis: | A physical-kinetic approach has been used for modeling of fast neutral atoms flow generation in the channel rays of abnormal glow discharge. The fast atoms are generated due to charge exchange of ions accelerated by voltage drop on the cathode layer of positive space charge. The limits of applicability of the created model and the range of operating parameters of the fast atom source are established for the Ar (gas) – Ta (cathode) pair. The work is directed towards implementation of the beam processing of dielectric optical nanostructured metamaterials with help of fast neutral atoms. |
| Databáze: | OpenAIRE |
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