Integrated Variable Importance Assessment in Multi-Stage Processes
| Autor: | Gianluca Gazzola, Doh-Soon Kwak, Dong Min Kim, Seung Hoon Tong, Bokeon Kim, Myong-Kee Jeong, Jeongsub Choi |
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| Rok vydání: | 2018 |
| Předmět: |
Structure (mathematical logic)
Hierarchy Process (engineering) Computer science 02 engineering and technology Condensed Matter Physics 01 natural sciences Industrial engineering Industrial and Manufacturing Engineering Electronic Optical and Magnetic Materials Random forest 010104 statistics & probability Variable (computer science) Permutation 0202 electrical engineering electronic engineering information engineering 020201 artificial intelligence & image processing Metric (unit) 0101 mathematics Electrical and Electronic Engineering Block (data storage) |
| Zdroj: | IEEE Transactions on Semiconductor Manufacturing. 31:343-355 |
| ISSN: | 1558-2345 0894-6507 |
| Popis: | We introduce integrated multi-stage importance assessment (IMSIA), a method for the assessment of stage importance in multi-stage processes (MSPs) characterized by a hierarchy of relationships between stages. The importance measured by IMSIA may be used as a basis to strategize intervention actions on key stages directed at influencing the process outcome. The method deconstructs the overall MSP into its local building blocks, each composed by a specific individual stage and all of its direct inputs. Within each building block, a random forest regression model and a novel conditional permutation metric are then employed to quantify the local contribution of every input to the stage in question. Global contributions are finally measured by integrating the local contribution assessments, based on the overall structure of indirect and direct relationships in the process. After a theoretical characterization of the procedure, we illustrate IMSIA on two simulated MSP, as well as on a real-world multi-stage process of industrial semiconductor manufacturing. |
| Databáze: | OpenAIRE |
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