A non-mass-analyzed solar cell ion implanter

Autor:	R. Bricault, S.N. Bunker, A.J. Armini
Rok vydání:	1985
Předmět:	Nuclear and High Energy Physics Materials science Yield (engineering) Silicon business.industry chemistry.chemical_element Semimetal law.invention Microprocessor Ion implantation chemistry law Solar cell Optoelectronics Wafer business Instrumentation Throughput (business)
Zdroj:	Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms. 6:94-99
ISSN:	0168-583X
DOI:	10.1016/0168-583x(85)90615-9
Popis:	The performance of a dedicated low energy (5–20 keV) non-mass-analyzed solar cell ion implanter is described. Using a new high throughput system, up to 600 4″ silicon wafers are processed per hour. Design features that yield an implant uniformity of better than 5% are presented. The wafer transport system including microprocessor control, continuous cassette-to-cassette operation, wafer cooling, and dose control are discussed. In addition, performance characteristics of non-mass-analyzed solar cells will be presented.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::5947da5733610dda4b45c75655049d51 https://doi.org/10.1016/0168-583x(85)90615-9 Zobrazit plný text záznamu