ALLIGATOR−An apparatus for ion beam assisted deposition with a broad‐beam ion source

Autor:	M. Barth, H. Wituschek, W. Ensinger, G. Frech, K. D. Leible, D. M. Rück, G. K. Wolf
Rok vydání:	1992
Předmět:	Beam diameter Materials science Ion beam business.industry Ion gun Focused ion beam Ion source Optics Ion beam deposition Atomic physics Electron beam-induced deposition Ion beam-assisted deposition business Instrumentation
Zdroj:	Review of Scientific Instruments. 63:2411-2413
ISSN:	1089-7623 0034-6748
DOI:	10.1063/1.1142946
Popis:	Ion beam assisted deposition is a versatile technique for preparing thin films and coatings for various applications. Up to now a prototype setup for research purposes has been used in our laboratory. Processing of industrial standard workpieces requires a high current ion source with broad beam and high uniformity for homogeneous bombardment. In this contribution a new apparatus for large area samples will be described. It is named ALLIGATOR (German acronym of facility for ion assisted evaporation on transverse movable or rotary targets). In order to have a wide energy range available two ion sources are used. One delivers a beam energy up to 1.3 keV. The other is suitable for energies from 5 keV up to 40 keV. The ‘‘high‐energy’’ ion source is a multicusp multiaperture source with 180‐mA total current and a beam diameter of 280 mm at the target position.
Databáze:	OpenAIRE
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