PIII Treatment of SS Samples Using a Current-Controlled High-Voltage Pulser

Autor:	Michel Felipe Lima de Araujo, Luc Pichon, Mario Ueda, Carlos Maurício Lepienski, Fernanda S. Yamasaki, Jose O. Rossi, Ataide Ribeiro Silva, H. Reuther
Rok vydání:	2020
Předmět:	Nuclear and High Energy Physics Glow discharge Materials science High voltage Hot filament Plasma Tribology Condensed Matter Physics 01 natural sciences Plasma-immersion ion implantation 010305 fluids & plasmas law.invention law 0103 physical sciences Voltage pulse Composite material Transformer
Zdroj:	IEEE Transactions on Plasma Science. 48:3800-3806
ISSN:	1939-9375 0093-3813
Popis:	Plasma immersion ion implantation (PIII) was conducted in a large volume chamber with a current-controlled high-voltage pulser, to test the vacuum, plasma, and PIII conditions, in a preparation for the treatments of large workpieces or the batch-processing mode. For that purpose, a rugged high-power pulser (10 kW average) based on solid-state moderate voltage pulse system (1 kV) was coupled to a high-voltage transformer (1:22) to feed different loaded sample supports placed in different positions inside the chamber. It was found that the plasma, when produced by a hot filament enhanced glow discharge source, is not uniformly distributed in the chamber but despite that, implantation doses are locally uniform within 10% for 10–15-cm distances, along with the supports. Stainless steel 304 (SS304) -type samples were successfully treated with nitrogen PIII and different tests showed improvements on their mechanical and tribological properties.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::5911bafd36cfdfbfdfe1028a103bdd34 https://doi.org/10.1109/tps.2020.3032119 Zobrazit plný text záznamu