Preparation of W-W 2 B composites from W-BN powders and properties of W-B-N barrier for copper metallization
| Autor: | E. del Rio, Eugene Y. Ivanov |
|---|---|
| Rok vydání: | 2018 |
| Předmět: |
010302 applied physics
Materials science chemistry.chemical_element 02 engineering and technology Tungsten 021001 nanoscience & nanotechnology Hot pressing 01 natural sciences Copper chemistry.chemical_compound chemistry Sputtering Boride 0103 physical sciences Composite material 0210 nano-technology Boron |
| Zdroj: | International Journal of Refractory Metals and Hard Materials. 72:223-227 |
| ISSN: | 0263-4368 |
| Popis: | Sintered composites of W-W2B were prepared from W-BN powders mixture using hot pressing technique that initiated reaction between W and BN at temperatures above 1973 K when BN decomposes and forming boron reacts with W powder to form tungsten boride. Fully densified W-W2B solid sputtering targets were prepared with the composition range W-Xwt% B (1 |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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