Subsurface measurement of nanostructures on GaAs by electrostatic force microscopy
| Autor: | Itaru Kamiya, Fumihiko Yamada |
|---|---|
| Rok vydání: | 2013 |
| Předmět: |
Kelvin probe force microscope
Materials science Electrostatic force microscope General Physics and Astronomy Nanotechnology Surfaces and Interfaces General Chemistry Conductive atomic force microscopy Scanning capacitance microscopy Condensed Matter Physics Surfaces Coatings and Films Scanning probe microscopy Microscopy Non-contact atomic force microscopy Photoconductive atomic force microscopy |
| Zdroj: | Applied Surface Science. 271:131-135 |
| ISSN: | 0169-4332 |
| Popis: | The size of surface buried oxide nanostructures are measured by electrostatic force microscopy (EFM). In contrast to atomic force microscopy that cannot probe subsurface structures and thickness, we show that EFM data include information about the thickness of individual nanostructures, consequently allowing us to determine the thickness of buried nanostructures on semiconductor substrates. We further show that this measurement can be performed simultaneously with AFM using EFM modulation spectroscopy. |
| Databáze: | OpenAIRE |
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