Replication of Metal-Based Microscale Structures

Autor: Edgar Lara-Curzio, C. O. Stevens, G. B. Sinclair, W. J. Meng, J. Jiang
Rok vydání: 2007
Předmět:
Zdroj: AIP Conference Proceedings.
ISSN: 0094-243X
DOI: 10.1063/1.2436338
Popis: Technologies capable of economical mass production of metal‐based high‐aspect‐ratio microscale structures (HARMS), with structural heights of several hundred μm offer the potential to realize many metal‐based microdevices. In this paper, our recent research on high‐temperature microscale compression molding of metal‐based HARMS from surface‐engineered, microscale, refractory metal inserts is summarized.
Databáze: OpenAIRE