Replication of Metal-Based Microscale Structures
Autor: | Edgar Lara-Curzio, C. O. Stevens, G. B. Sinclair, W. J. Meng, J. Jiang |
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Rok vydání: | 2007 |
Předmět: | |
Zdroj: | AIP Conference Proceedings. |
ISSN: | 0094-243X |
DOI: | 10.1063/1.2436338 |
Popis: | Technologies capable of economical mass production of metal‐based high‐aspect‐ratio microscale structures (HARMS), with structural heights of several hundred μm offer the potential to realize many metal‐based microdevices. In this paper, our recent research on high‐temperature microscale compression molding of metal‐based HARMS from surface‐engineered, microscale, refractory metal inserts is summarized. |
Databáze: | OpenAIRE |
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