High quality superconducting thin films by sputtering
| Autor: | Guang-cheng Xiong, G.R. Liu, Z.F. Dong, Zhongxian Zhao, Q.S. Yang, Bing-chuan Yang |
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| Rok vydání: | 1991 |
| Předmět: |
Superconductivity
Materials science business.industry Energy Engineering and Power Technology Sputter deposition Condensed Matter Physics Electronic Optical and Magnetic Materials Quality (physics) Sputtering Optoelectronics Electrical and Electronic Engineering Thin film High-power impulse magnetron sputtering business Yttria-stabilized zirconia Deposition (law) |
| Zdroj: | Physica C: Superconductivity. :1953-1954 |
| ISSN: | 0921-4534 |
| DOI: | 10.1016/0921-4534(91)91101-9 |
| Popis: | High quality superconducting thin films of YBaCuO and Bi(Pb)SrCaCuO were reproducibly prepared by ion beam sputtering and rf magnetron sputtering from a single bulk target or a single off-stoichiometry powder target. The substrates with (100) surfaces of YSZ, SrTiO 3 , LaAlO 3 and MgO were used. We review our work on the synthesis of these thin films obtained by both in situ deposition and postannealing method. The details of thin film growth, superconducting properties, morphology, film-substrate interdiffusions, structures and crystallinities were presented and discussed. |
| Databáze: | OpenAIRE |
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