Transmittance from visible to mid infra-red in AZO films grown by atomic layer deposition system
| Autor: | Rachel Christian, Parag Vasekar, Dimitrios Koukis, Seshu Desu, Charles R. Westgate, Daniel J. Arenas, Abhishek Nandur, Tara P. Dhakal, David B. Tanner |
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| Rok vydání: | 2012 |
| Předmět: |
Materials science
Renewable Energy Sustainability and the Environment business.industry Infrared Annealing (metallurgy) chemistry.chemical_element Zinc Conductivity Atomic layer deposition Charge-carrier density chemistry Transmittance Optoelectronics General Materials Science business Sheet resistance |
| Zdroj: | Solar Energy. 86:1306-1312 |
| ISSN: | 0038-092X |
| DOI: | 10.1016/j.solener.2012.01.022 |
| Popis: | We report transmittance and conductivity measurements of aluminum-doped zinc oxide films grown by atomic layer deposition. The results show that the films have 80–90% transmittance in the visible region and good transmittance in the infrared. To our knowledge, this is the first time that the transmittance of aluminum-doped zinc oxide is reported to extend beyond 2500–5000 nm. Following annealing, an optimal sheet resistance of 25 X/h was obtained for a 575 nm thick film with a carrier density of 2.4 10 20 cm 3 without com |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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