In-Line Hologram for Plasma Diagnostics
| Autor: | Jin-Su Jung, Byungwhan Kim |
|---|---|
| Rok vydání: | 2016 |
| Předmět: |
Materials science
business.industry 010401 analytical chemistry Holography Plasma Laser 01 natural sciences Atomic and Molecular Physics and Optics Charged particle 0104 chemical sciences law.invention symbols.namesake Light intensity Computer Science::Graphics Optics Physics::Plasma Physics law Reference beam 0103 physical sciences symbols Langmuir probe Plasma diagnostics 010306 general physics business |
| Zdroj: | Journal of the Optical Society of Korea. 20:524-529 |
| ISSN: | 1226-4776 |
| DOI: | 10.3807/josk.2016.20.4.524 |
| Popis: | Diagnostic sensors are demanded during plasma processes. Holograms of plasma taken with laser light without a reference beam were used to monitor behaviors of charged particles produced in nitrogen plasma as a function of electrode temperature ranging between 50 and 300℃. Holograms were characterized as a function of the pixel sum and grayscale value. Pixel sum calculated in identified grayscale ranges strongly correlated with ion density and emitted light intensity measured with a langmuir probe and optical emission spectroscopy, respectively. The performance was further evaluated with data acquired as a function of N2 and NH3 flow rates and improved correlations were observed in the new grayscale range. The confirmed correlations indicate that a hologram is a viable means to diagnose behaviors of plasma particles such as ions. Underlying principles are discussed in view of particle and charge composing vacuum and light. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
|