Fabrication of Low-Temperature (< 400 °C) Germanium MOSCAPs by Microwave Thermal Oxidation

Autor:	C.C. Hsu, W.C. Chi, Chao-Hsin Chien, A.S. Shih, Yao-Jen Lee, C.H. Chou
Rok vydání:	2015
Předmět:	Thermal oxidation Fabrication Materials science chemistry business.industry Optoelectronics chemistry.chemical_element Germanium business Microwave
Zdroj:	Extended Abstracts of the 2015 International Conference on Solid State Devices and Materials.
DOI:	10.7567/ssdm.2015.ps-1-6
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::587d085f754c085a548a81410a884075 https://doi.org/10.7567/ssdm.2015.ps-1-6 Zobrazit plný text záznamu