| Popis: |
High pressure microwave discharges (150 Torr to one atmosphere) have been the focus of numerous recent experimental investigations such as microwave plasmoid/microwave fireball investigations1, microwave plasma assisted combustion2, and microwave plasma assisted gas reforming, and also recent commercial applications such as CVD diamond synthesis3. In each of these experiments discharge control and the coupling efficiency become very important as the pressure is increased. This is especially true as applications move toward commercial realization. |
