Enrichment in molybdenum carbides and nitrides during Ar+ bombardment
| Autor: | M. Maoujoud, F. Bouillon, M. Jardinier-Offergeld |
|---|---|
| Rok vydání: | 1993 |
| Předmět: |
Auger electron spectroscopy
Argon Metals and Alloys Analytical chemistry chemistry.chemical_element Ionic bonding Surfaces and Interfaces Nitride Surfaces Coatings and Films Electronic Optical and Magnetic Materials Carbide chemistry Sputtering Molybdenum Materials Chemistry Stoichiometry Nuclear chemistry |
| Zdroj: | Thin Solid Films. 230:28-34 |
| ISSN: | 0040-6090 |
| DOI: | 10.1016/0040-6090(93)90342-m |
| Popis: | α-Mo2C, δ-MoN and MoO3 interstitial compounds, obtained by direct metal-gas interaction, were investigated by coupled Auger electron spectroscopy (AES) and ionic erosion with Ar+. It was found that, when the energy EAr+ varies from 3.5 to 1 keV, the relative AES signal hx(KL2, 3L2, 3)/hMo(M4, 5N2, 3N4, 5) (X ≡ C and N in the case of the MoC and MoN systems respectively) is attenuated. It indicates a preferential enrichment in molybdenum on the film surface at a low energy (less than 1.5 keV). The observed behaviour was interpreted in terms of preferential reimplantation and sputtering of C and N. The relative sensitivity coefficients of carbon, nitrogen and oxygen compared with molybdenum were also determined. |
| Databáze: | OpenAIRE |
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