A MEMS Low-Noise Sound Pressure Gradient Microphone With Capacitive Sensing

Autor:	Ronald N. Miles, Weili Cui, Dorel Homentcovschi, Quang T. Su
Rok vydání:	2015
Předmět:	Materials science Microphone Diaphragm (acoustics) Mechanical Engineering Acoustics Capacitive sensing Noise-canceling microphone Electrical and Electronic Engineering Sound pressure Noise floor Directivity Phantom power
Zdroj:	Journal of Microelectromechanical Systems. 24:241-248
ISSN:	1941-0158 1057-7157
DOI:	10.1109/jmems.2014.2329136
Popis:	A silicon microelectromechanical systems microphone is described that detects sound pressure gradients. The diaphragm consists of a stiffened plate that rotates around a central axis in response to sound pressure gradients. The motion of the diaphragm is converted into an electronic signal through the use of interdigitated comb fins that enable capacitive sensing. Measured results show that the microphone achieves a substantially lower low-frequency sound pressure-referred noise floor than can be achieved using existing dual miniature microphone systems. Measured directivity patterns are shown to be very close to what is expected for sound pressure gradient receivers over a broad range of frequencies.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::583811e5754294d35b20bcbf82b4f185 https://doi.org/10.1109/jmems.2014.2329136 Zobrazit plný text záznamu