Micro-Photoacoustic Cell with Integrated Microphone for Sub-Ppm Gas Sensing
| Autor: | Jean-Guillaume Coutard, Frederic Souchon, Alexandre Teulle, B. Desloges, Jean-Marc Fedeli, Alain Glière, Helene Lhermet, Thierry Verdot, Maryse Fournier, Audrey Berthelot |
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| Rok vydání: | 2019 |
| Předmět: |
Microelectromechanical systems
Materials science business.industry Microphone 010401 analytical chemistry Detector Parts-per notation 020206 networking & telecommunications 02 engineering and technology 01 natural sciences 0104 chemical sciences Trace gas law.invention Transducer law 0202 electrical engineering electronic engineering information engineering Miniaturization Optoelectronics business Quantum cascade laser |
| Zdroj: | 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII). |
| Popis: | This paper demonstrates, for the first time, an on-chip integration of a photoacoustic (PA) detector, one of the main building blocks required for chemical sensing. This MEMS PA detector consists of a miniaturized PA cell within an acoustic transducer based on an innovative microphone architecture. Coupled with a quantum cascade laser (QCL) source, this trace gas detector can measure very low concentrations of less than one part per million. |
| Databáze: | OpenAIRE |
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