Thermodynamic evaluation of nucleation as a method for selection of aluminium nitride modifications
| Autor: | E.V. Polyakov, V. S. Kudyakova, K. V. Zvonarev, F. M. Zykov, R. A. Shishkin, A. R. Beketov, A. V. Chukin |
|---|---|
| Rok vydání: | 2018 |
| Předmět: |
010302 applied physics
Supersaturation Materials science Aluminium nitride Nucleation Thermodynamics 02 engineering and technology Chemical vapor deposition 021001 nanoscience & nanotechnology Condensed Matter Physics 01 natural sciences Inorganic Chemistry chemistry.chemical_compound Thermal conductivity chemistry Scientific method 0103 physical sciences Materials Chemistry 0210 nano-technology |
| Zdroj: | Journal of Crystal Growth. 486:111-116 |
| ISSN: | 0022-0248 |
| Popis: | The Volmer and Wulf models have been used to study the process of nucleation of aluminium nitride modifications. The sizes of the critical nuclei of aluminium nitride modifications have been determined depending on the degree of supersaturation. It has been demonstrated that by varying the technological parameters of chemical vapour deposition it is possible to determine the conditions for selection of AlN modifications. |
| Databáze: | OpenAIRE |
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