Temperature dependence of angular characteristics of boron nitride sputtering
| Autor: | S. S. Elovikov, M. Yu. Tolpina, V. E. Yurasova, E. Yu. Zykova |
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| Rok vydání: | 2009 |
| Předmět: |
Yield (engineering)
Materials science chemistry.chemical_element Atmospheric temperature range Surfaces Coatings and Films Ion Condensed Matter::Materials Science chemistry.chemical_compound Xenon chemistry Boron nitride Sputtering Physics::Atomic and Molecular Clusters Thin film Atomic physics Wurtzite crystal structure |
| Zdroj: | Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques. 3:21-28 |
| ISSN: | 1819-7094 1027-4510 |
| DOI: | 10.1134/s1027451009010042 |
| Popis: | The angular dependence of the sputtering yield and the spatial distribution of particles ejecting from a boron nitride polycrystal with a wurtzite structure in the temperature range from 0 to 2800°C under bombardment with 300 eV xenon ions are calculated by the molecular dynamics method. A reduction of steepness of the curves of angular dependence of boron nitride sputtering with increasing temperature is revealed. Features of the obtained distributions are analyzed on the basis of mechanisms of interaction of slow heavy ions with surface target atoms. |
| Databáze: | OpenAIRE |
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