Characterization of Ultra-Thin SOI and SSOI Substrates
| Autor: | Stephen Bedell, Harold Hovel, Anthony Domenicucci, Keith Fogel, Devendra Sadana, Alexander Reznicek |
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| Rok vydání: | 2006 |
| Zdroj: | ECS Meeting Abstracts. :572-572 |
| ISSN: | 2151-2043 |
| DOI: | 10.1149/ma2005-01/12/572 |
| Popis: | not Available. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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