Reduction, reclaim and reuse of sulfuric acid in piranha cleans: GF: Green factory
| Autor: | Tae-hoon Kim, Sushil K. R. Patil, Ioan Baru, Mark Conrad, Albert Franzi, Sneha Gaddam |
|---|---|
| Rok vydání: | 2017 |
| Předmět: |
0209 industrial biotechnology
Engineering Waste management business.industry Sulfuric acid 02 engineering and technology Reuse Reduction (complexity) chemistry.chemical_compound 020901 industrial engineering & automation Piranha 020401 chemical engineering chemistry Factory (object-oriented programming) 0204 chemical engineering business |
| Zdroj: | 2017 28th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC). |
| DOI: | 10.1109/asmc.2017.7969264 |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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