MEMS Flow Sensor Based on a Sigma–Delta Modulator Embedded in the Thermal Domain

Autor:	F. Del Cesta, A. N. Longhitano, Massimo Piotto, Paolo Bruschi
Rok vydání:	2013
Předmět:	Physics::Fluid Dynamics Microelectromechanical systems Materials science Flow (mathematics) Interface (computing) Microsystem Electronic engineering Common-mode signal Delta-sigma modulation Flow measurement Computer Science::Other Domain (software engineering)
Zdroj:	Lecture Notes in Electrical Engineering ISBN: 9783319006833
DOI:	10.1007/978-3-319-00684-0_58
Popis:	A system for gas flow measurement, based on MEMS flow sensing microstructures and a sigma–delta interface, is described. The sensing structures consist of double-heater differential microcalorimeters, obtained by means of a post-processing procedure applied to chips fabricated using the Bipolar-CMOS-DMOS process BCD6s of STMicroelectronics. Part of the sigma–delta modulator is implemented in the thermal domain by exploiting the versatility of the double-heater sensing structures. The measurements performed in nitrogen flow prove the effectiveness of the proposed approach.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::577cd28b0309c31f9e82722acf570812 https://doi.org/10.1007/978-3-319-00684-0_58 Zobrazit plný text záznamu