A high-precision and small-volume stepping displacement microplatform for focusing ion beam etching of optical antenna

Autor:	Zhang Xinyu, Changsheng Xie, Xinjie Han, Zhaowei Xin, Dong Wei, Junjie Meng, Haiwei Wang, Wanwan Dai
Rok vydání:	2018
Předmět:	Optics Materials science Small volume business.industry Optical antenna Displacement (orthopedic surgery) Ion beam etching business
Zdroj:	Tenth International Conference on Information Optics and Photonics.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::576d8317a33d0b95a126fee35a28ab44 https://doi.org/10.1117/12.2505957 Zobrazit plný text záznamu