Suspended AlGaN/GaN membrane devices with recessed open gate areas for ultra-low-power air quality monitoring

Autor:	Stefaan Decoutere, Ahmed Si-Ali, Silvia Lenci, Karen Geens, Rob van Schaijk, Greja Brom-Verheyden, Peter Offermans, Marleen Van Hove
Rok vydání:	2015
Předmět:	Air quality monitoring Ultra low power Membrane Materials science Interference (communication) business.industry Wide-bandgap semiconductor Optoelectronics Humidity Wafer business Sensitivity (electronics)
Zdroj:	2015 IEEE International Electron Devices Meeting (IEDM).
DOI:	10.1109/iedm.2015.7409823
Popis:	We have developed a novel gas sensor platform for ultra-low-power air quality monitoring based on suspended AlGaN/GaN membranes fabricated on 8 inch Si(111) wafers. Due to precise sensing area recessing, the device shows excellent sensitivity to NO2, a major air pollutant, allowing the detection of single-ppb steps in the gas concentration. A key feature of the device is the small interference from humidity. We show extension of the platform to NH3, H2 and CO2 detection.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::5734db45fde1c10a716a1442d78b359b https://doi.org/10.1109/iedm.2015.7409823 Zobrazit plný text záznamu