Low-Temperature Deposition of Yttrium Oxide on Flexible PET Films Using Time-Separated Yttrium Precursor and Oxidizer Injections

Autor:	Kentaro SAITO, Kazuki YOSHIDA, Masanori MIURA, Kensaku KANOMATA, Bashir AHMMAD, Shigeru KUBOTA, Fumihiko HIROSE
Rok vydání:	2022
Předmět:	Electrical and Electronic Engineering Electronic Optical and Magnetic Materials
Zdroj:	IEICE Transactions on Electronics. :604-609
ISSN:	1745-1353 0916-8524
DOI:	10.1587/transele.2021fup0002
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::572471ad3acc9397a00ebcf1cc73689f https://doi.org/10.1587/transele.2021fup0002 Zobrazit plný text záznamu