Internal Structuring of Semiconductors with Ultrafast Lasers: Opening a Route to Three-Dimensional Silicon Photonics

Autor:	David Grojo, Maxime Chambonneau, Shuting Lei, Alexandros Mouskeftaras, Olivier Utéza, Andong Wang
Rok vydání:	2023
Zdroj:	Springer Series in Optical Sciences ISBN: 9783031147517
DOI:	10.1007/978-3-031-14752-4_27
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::5712d18d8a09d0c1b560456fd9984575 https://doi.org/10.1007/978-3-031-14752-4_27 Zobrazit plný text záznamu