| Autor: |
Yong-Ha Song, Jun-Bo Yoon, Byung-Kee Lee |
| Rok vydání: |
2009 |
| Předmět: |
|
| Zdroj: |
2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems. |
| DOI: |
10.1109/memsys.2009.4805340 |
| Popis: |
This paper presents transparent conductive oxide (TCO) switches on glass substrates using indium tin oxide (ITO) for the first time. Mechanical properties of the sputtered ITO film on the glass (density : 7.3gcm-3, Young's modulus : ~190GPa) were measured by X-ray reflectivity (XRR) and nano-indentation analysis. Improvement of transmittance, sheet resistance and wet-etching of 1-?m-thick sputtered ITO was obtained through thermal annealing at 230°C. The fabricated MEMS switches made of ITO with a length of 50?m and width of 10?m showed the pull-in voltage of 23V and pull-out voltage of 20V, and an excellent ON/OFF current ratio of ~106. In addition, up to 10?A current could flow through the transparent MEMS switch. |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
|
