Dependence of dielectric layer and electrolyte on the driving performance of electrowetting‐based liquid lens

Autor:	Hak-Rin Kim, Seong Ho Kong, June Kyoo Lee, Kyung-Woo Park
Rok vydání:	2010
Předmět:	Materials science business.industry Dielectric Electrolyte law.invention Lens (optics) Contact angle Optics law Electrode Electrowetting Optoelectronics Focal length General Materials Science Electrical and Electronic Engineering business Layer (electronics)
Zdroj:	Journal of Information Display. 11:84-90
ISSN:	2158-1606 1598-0316
DOI:	10.1080/15980316.2010.9652125
Popis:	This paper presents the effects of a dielectric layer and an electrolyte on the driving performance of an electrowetting on dielectric (EWOD)‐based liquid lens. The range of tunable focal length of the EWOD‐based liquid lens was highly dependent on the conditions of the dielectric layer, which included an inorganic oxide layer and an organic hydrophobic layer. Moreover, experiments on the physical and optical durability of electrolyte by varying temperature conditions, were conducted and their results were discussed. Finally, the lens with a truncated‐pyramid silicon cavity having a sidewall dielectrics and electrode was fabricated by anisotropic etching and other micro‐electromechanical systems (MEMS) technologies in order to demonstrate its performance. The lens with 0.6 ‐μm‐thick SiO2 layer and 10 wt% LiCl‐electrolyte exhibited brilliant focal‐length tunability from infinity to 3.19 mm.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::5646651812675d1485cb9318211aa975 https://doi.org/10.1080/15980316.2010.9652125 Zobrazit plný text záznamu