Autor: |
B. Reuscher, Hubert Gnaser, Anna Zeuner |
Rok vydání: |
2012 |
Předmět: |
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Zdroj: |
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms. 285:142-147 |
ISSN: |
0168-583X |
DOI: |
10.1016/j.nimb.2012.05.028 |
Popis: |
The irradiation of glass surfaces by 30 keV Ga + ions under oblique incidence angles results in the development of “ripple”-like nanostructures. The evolution of these ripples was monitored in situ in the ion fluence range from 3 × 10 16 to 1 × 10 18 Ga + ions/cm 2 using a focused ion beam system which incorporates a scanning electron microscope. With increasing fluence, the ripples were found to propagate across the surface in a direction which coincides with the projection of the ion beam’s incident direction onto the surface. The propagation velocity was determined to be constant over the investigated fluence regime and to amount to 77 ± 1.8 nm/10 17 ions cm −2 . Ex situ atomic force microscopy was employed to derive the post-mortem wavelength and amplitude of the ripple structures and their values were 450 ± 43 and 127 ± 23 nm, respectively. |
Databáze: |
OpenAIRE |
Externí odkaz: |
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