Single-mode and ultra-broadband gigahertz surface acoustic waveguides on AlN-on-SiC substrates

Autor:	Yong Wang, Shu-Mao Wu, Si-Yuan Yu, Yongzhong Wu, Xiaopeng Hao, Yan-Feng Chen
Rok vydání:	2022
Předmět:	Acoustics and Ultrasonics Condensed Matter Physics Surfaces Coatings and Films Electronic Optical and Magnetic Materials
Zdroj:	Journal of Physics D: Applied Physics. 55:425106
ISSN:	1361-6463 0022-3727
DOI:	10.1088/1361-6463/ac855b
Popis:	This paper proposes a class of high-performance surface acoustic wave (SAW) waveguides based on AlN-on-SiC substrates. Under the existing crystal growth and processing technology, these SAW waveguides offer excellent performance in single mode, low loss, ultra-broadband, operating at gigahertz frequencies. Quasi-Rayleigh SAWs can be excited by traditional interdigital transducers and guided freely with excellent efficiency. Based on these SAW waveguides, we further demonstrate SAW splitters and ring cavities with ultra-high qualities up to 107. These SAW components complement future integrated phononic circuits for high-frequency and compact acoustic manipulating, signal processing, sensing, computing, etc.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::5607314bceb572eb0a13c592e2a53594 https://doi.org/10.1088/1361-6463/ac855b Zobrazit plný text záznamu