Beam delivery system with a non-digitized diffractive beam splitter for laser-drilling of silicon
| Autor: | J. Amako, E. Fujii |
|---|---|
| Rok vydání: | 2016 |
| Předmět: |
Materials science
Physics::Optics 02 engineering and technology 01 natural sciences Beam parameter product law.invention 010309 optics Optics law 0103 physical sciences Radial polarization Diffractive beam splitter Electrical and Electronic Engineering Beam diameter business.industry Mechanical Engineering 021001 nanoscience & nanotechnology Atomic and Molecular Physics and Optics Electronic Optical and Magnetic Materials Physics::Accelerator Physics Optoelectronics Laser beam quality 0210 nano-technology business Beam (structure) Beam splitter Beam divergence |
| Zdroj: | Optics and Lasers in Engineering. 77:1-7 |
| ISSN: | 0143-8166 |
| DOI: | 10.1016/j.optlaseng.2015.07.006 |
| Popis: | We report a beam-delivery system consisting of a non-digitized diffractive beam splitter and a Fourier transform lens. The system is applied to the deep-drilling of silicon using a nanosecond pulse laser in the manufacture of inkjet printer heads. In this process, a circularly polarized pulse beam is divided into an array of uniform beams, which are then delivered precisely to the process points. To meet these requirements, the splitter was designed to be polarization-independent with an efficiency>95%. The optical elements were assembled so as to allow the fine tuning of the effective overall focal length by adjusting the wavefront curvature of the beam. Using the system, a beam alignment accuracy of |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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