A Transmission Electron Microscopy (TEM) Study of Oxygen Precipitation Induced by Internal Gettering in Low and High Oxygen Wafers
| Autor: | L. Rivaud, G. R. Erikson, C. N. Anagnostopoulos |
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| Rok vydání: | 1988 |
| Předmět: |
Silicon
Renewable Energy Sustainability and the Environment Precipitation (chemistry) Analytical chemistry chemistry.chemical_element Mineralogy Condensed Matter Physics Oxygen Surfaces Coatings and Films Electronic Optical and Magnetic Materials chemistry Transmission electron microscopy Getter Impurity Vacancy defect Materials Chemistry Electrochemistry Wafer |
| Zdroj: | Journal of The Electrochemical Society. 135:437-442 |
| ISSN: | 1945-7111 0013-4651 |
| DOI: | 10.1149/1.2095633 |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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