Amorphous TiOxFilms Prepared by Cold Plasma Technique

Autor:	S. Narksitipan
Rok vydání:	2013
Předmět:	Morphology (linguistics) Materials science genetic structures Plasma Condensed Matter Physics eye diseases Rod Electronic Optical and Magnetic Materials Amorphous solid Crystallinity Wavelength Carbon film Chemical engineering sense organs Thin film
Zdroj:	Ferroelectrics. 456:113-119
ISSN:	1563-5112 0015-0193
DOI:	10.1080/00150193.2013.846678
Popis:	TiOx thin films have been prepared on glasses by using nitrogen cold-plasma was induced by high electrical field and frequency, which deposited on the films surface at 450–550°C for 20 min, and the effect of temperature on the crystallinity, chemical compositions, morphology and optical properties were studied through XRD, EDS, SEM and UV-Vis spectrophotometer, respectively. The films were amorphous. SEM images have shown the films consist of rods shape, which were agglomerated and arrange in a porous microstructure. The optical transmittance of the films responded in the UV region and shifted to shorter wavelength as increasing temperature.
Databáze:	OpenAIRE
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