High-Performance On-Chip Hot-Pressed NdFeB Hard Magnets for MEMS Applications
| Autor: | Yi Zhang, Huaihao Chen, Xianfeng Liang, Don Heiman, Cunzheng Dong, Chengju Yu, Mohsen Zaeimbashi, Yifan He, Jiawei Wang, Gregory M. Stephen, Cheng Tu, Baoxing Chen, Samer Haidar, Yuyi Wei, Nian X. Sun |
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| Rok vydání: | 2021 |
| Předmět: |
010302 applied physics
Microelectromechanical systems Pressing Materials science Fabrication Silicon chemistry.chemical_element Molding (process) 01 natural sciences Electronic Optical and Magnetic Materials Neodymium magnet chemistry Remanence Magnet 0103 physical sciences Electrical and Electronic Engineering Composite material |
| Zdroj: | IEEE Transactions on Magnetics. 57:1-4 |
| ISSN: | 1941-0069 0018-9464 |
| DOI: | 10.1109/tmag.2021.3057271 |
| Popis: | In order to advance the potential of thick on-chip hard magnets for the micro-electro-mechanical system (MEMS), we investigate a new silicon molding technique to fabricate dry-packed NdFeB magnets, including a silicon compression tool, which enables the pressing step during silicon-compatible processing. This process delivers samples with a remanence of 0.42 T and an energy product of 38 kJ/m3. Further studies of metal molding show that, for wax-bonding powder-based NdFeB magnets, the optimum fabrication condition is 300 °C and 425 MPa, giving a remanence of 0.54 T and an energy product of 61.7 kJ/m3. |
| Databáze: | OpenAIRE |
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