Circular diaphragm-based MOEMS pressure sensor using ring resonator
| Autor: | N. Mamatha, P. C. Srikanth, P. R. Yashaswini |
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| Rok vydání: | 2020 |
| Předmět: |
Computer Networks and Communications
business.industry Computer science Applied Mathematics Multiphysics Finite-difference time-domain method 020206 networking & telecommunications Diaphragm (mechanical device) 02 engineering and technology Deformation (meteorology) Pressure sensor Computer Science Applications Stress (mechanics) Resonator Optics Computational Theory and Mathematics Artificial Intelligence 0202 electrical engineering electronic engineering information engineering 020201 artificial intelligence & image processing Electrical and Electronic Engineering business Information Systems Photonic crystal |
| Zdroj: | International Journal of Information Technology. 13:213-220 |
| ISSN: | 2511-2112 2511-2104 |
| DOI: | 10.1007/s41870-020-00534-5 |
| Popis: | A photonic crystal based MOEMS pressure sensor design is presented in this work. The key design element is a circular diaphragm made of silicon (Si), integrated with a hexagonal ring resonator in the middle. The novelty of the work is the arrangement of the holes in the Si diaphragm in triangular orientation and optimization of sensitivity for pressure sensing. The pressure is applied at the center of the diaphragm which resulted in deformation, stress, and strain. The minimum observable deformation is 1.0073 nm and is at 6.3 µPa. The corresponding change in the refractive index is calculated for the stress applied. The resonant wavelength obtained for without load is 1.598 µm. The shift in the resonant wavelength for different loads are observed and tabulated. The modeling tool used to extract the mechanical parameters is ANSYS multiphysics. For 2D modeling and simulation of the ring resonator structure, MEEP is used for the implementation of FDTD. The Q-factor observed is 12,245 and sensitivity reported as 316.15 nm/RIU respectively. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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