| Autor: |
T.M. Wellerand, S.P. Natarajan, A.M. Hoff |
| Rok vydání: |
2006 |
| Předmět: |
|
| Zdroj: |
2006 IEEE MTT-S International Microwave Symposium Digest. |
| DOI: |
10.1109/mwsym.2006.249581 |
| Popis: |
Three-dimensional micro coaxial transmission lines have been fabricated and measured on CMOS grade silicon wafers. One of the unique features of the structure is the perforated, coral-like outer shield and signal line which provides a means to control characteristic impedance and facilitates sacrificial layer removal after multi-layer deposition. These lines can thus be used to realize multilayer vertical interconnects with embedded MEM devices for RF to mm-wave frequencies. Measured S-parameters through 40 GHz for lines of varying impedance and perforation density are presented. |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
|
