Microfabrication of two layer structures of electrically isolated wires using self-assembly to guide the deposition of insulating organic polymer
| Autor: | George N. Maracas, Andrew J. Black, Joseph H. Thywissen, Mara Prentiss, George M. Whitesides, M. Deshpande, N. El-Zein, Paul F. Nealey |
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| Rok vydání: | 2000 |
| Předmět: |
chemistry.chemical_classification
Materials science Fabrication business.industry Metals and Alloys Electrical engineering Polymer Condensed Matter Physics Inductor Soft lithography Surfaces Coatings and Films Electronic Optical and Magnetic Materials chemistry Microcontact printing Optoelectronics Electrical and Electronic Engineering business Instrumentation Lithography Layer (electronics) Microfabrication |
| Zdroj: | Sensors and Actuators A: Physical. 86:96-102 |
| ISSN: | 0924-4247 |
| DOI: | 10.1016/s0924-4247(00)00422-2 |
| Popis: | The fabrication of two layer structures of electrically isolated wire — crossed wire structures and a surface coil inductor — is described. The fabrication process utilizes the tools of soft lithography and incorporates two levels of self-assembly. The use of microcontact printing and patterned self-assembly of liquid polymers removes the need for registration of the insulating layer with the underlying layer as required in conventional lithography techniques. The performance characteristics of the surface coil inductor are measured and closely resemble those predicted by theory. |
| Databáze: | OpenAIRE |
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