Investigation of properties of Ta-doped Ga2O3 films prepared with seed layers

Autor:	Jie Deng, Haofei Huang, Ke Tang, Shilin Wang, Mengqian Wang, Zun Liu, Keyun Gu, Yi Shang, Linjun Wang, Jian Huang
Rok vydání:	2023
Předmět:	Electrical and Electronic Engineering Atomic and Molecular Physics and Optics Electronic Optical and Magnetic Materials
Zdroj:	Optik. 274:170550
ISSN:	0030-4026
DOI:	10.1016/j.ijleo.2023.170550
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::55236df8096f8c91f435f57e83816c5f https://doi.org/10.1016/j.ijleo.2023.170550 Zobrazit plný text záznamu Full Text from ScienceDirect