Phase Control of Crystalline Ga2O3 Films by Plasma-Enhanced Atomic Layer Deposition
| Autor: | Charles R. Eddy, Neeraj Nepal, Luke O. Nyakiti, Syed B. Qadri, David J. Meyer, Scott G. Walton, G. M. Foster, Andrew D. Koehler, Virginia D. Wheeler, Andrew C. Lang, David R. Boris |
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| Rok vydání: | 2020 |
| Předmět: |
Materials science
General Chemical Engineering 02 engineering and technology General Chemistry Plasma 010402 general chemistry 021001 nanoscience & nanotechnology 01 natural sciences 0104 chemical sciences Atomic layer deposition Chemical engineering Power electronics Metastability Materials Chemistry 0210 nano-technology Phase control |
| Zdroj: | Chemistry of Materials. 32:1140-1152 |
| ISSN: | 1520-5002 0897-4756 |
| DOI: | 10.1021/acs.chemmater.9b03926 |
| Popis: | Ga2O3 has emerged as a promising material for next-generation power electronics. Beyond the most stable and studied β phase, metastable α-, e-, and κ-Ga2O3 have unique characteristics such as large... |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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