Comparative study on effects of Ni ion implantation on amorphous carbon (a-C) coating and tetrahedral amorphous carbon (ta-C) coating
| Autor: | Bin Liao, Zhiqiang Zhang, Xu Zhang, Xianying Wu, Yongqing Shen |
|---|---|
| Rok vydání: | 2020 |
| Předmět: |
Nuclear and High Energy Physics
Materials science 02 engineering and technology Vacuum arc Tribology engineering.material 021001 nanoscience & nanotechnology symbols.namesake 020303 mechanical engineering & transports Ion implantation 0203 mechanical engineering Coating Amorphous carbon engineering symbols High-power impulse magnetron sputtering Composite material 0210 nano-technology Raman spectroscopy Instrumentation Layer (electronics) |
| Zdroj: | Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms. 467:1-8 |
| ISSN: | 0168-583X |
| DOI: | 10.1016/j.nimb.2020.01.016 |
| Popis: | The effect of Ni ion implantation by 20 keV energy with fluences of 1 × 1016 cm−2 on tetrahedral amorphous carbon (ta-C) and amorphous carbon (a-C) films was studied. The ta-C and a-C films were deposited using filtered cathodic vacuum arc and high power impulse magnetron sputtering technique, respectively. The morphology, chemical bonding state, and mechanical and tribological performances of the coating before and after implantation were evaluated. The Raman results suggested that Ni implantation resulted in an increase in ID/IG ratio of ta-C film from 0.68 to 0.86, but led to a decrease of a-C films from 2.71 to 2.63. Ni ion implantation resulted in a decrease in wear resistance of ta-C films. The as-deposited and Ni-implanted a-C films both occur peeling off in the friction test, but Ni-implanted a-C films showed better wear resistance due to the increased elastic recovery rate and hardness in the modification layer. |
| Databáze: | OpenAIRE |
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