Study of TiO2 nanomembranes obtained by an induction heated MOCVD reactor
| Autor: | Ioan Ciobanu, Denis Chaumont, A. Crisbasan, A.M. Lazar, M. Sacilotti, Aurel Crisan, Rémi Chassagnon, Yvon Lacroute |
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| Rok vydání: | 2015 |
| Předmět: |
Induction heating
Materials science Oxide General Physics and Astronomy chemistry.chemical_element Nanotechnology Surfaces and Interfaces General Chemistry Chemical vapor deposition Condensed Matter Physics Evaporation (deposition) Surfaces Coatings and Films law.invention Surface coating chemistry.chemical_compound chemistry law Metalorganic vapour phase epitaxy Cobalt Susceptor |
| Zdroj: | Applied Surface Science. 358:655-659 |
| ISSN: | 0169-4332 |
| DOI: | 10.1016/j.apsusc.2015.09.113 |
| Popis: | Nanostructures of TiO2 were grown using the metal oxide chemical vapor deposition (MOCVD) technique. The procedure used induction heating on a graphite susceptor. This specific feature and the use of cobalt and ferrocene catalysts resulted in nanomembranes never obtained by common MOCVD reactors. The present study discusses the preparation of TiO2 nanomembranes and the dependence of nanomembrane structure and morphology on growth parameters. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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