Cascadable RF MEMS switched capacitors for 0.1–2 GHz applications

Autor:	Isak Reines, Gabriel M. Rebeiz
Rok vydání:	2009
Předmět:	Microelectromechanical systems Materials science business.industry Electrical engineering Beam geometry Ranging Capacitance law.invention Capacitor Ultra high frequency law Optoelectronics Radio frequency business Electrical impedance
Zdroj:	2009 IEEE MTT-S International Microwave Symposium Digest.
DOI:	10.1109/mwsym.2009.5165907
Popis:	This paper presents an RF MEMS switched-capacitor suitable for VHF and UHF tunable filters and reconfigurable matching networks. The device is based on a symmetric circular beam geometry that results in low-series-inductance compact device arrays for high-value capacitances. Device arrays are shown with down-state capacitances ranging from 11.22 to 17.49 pF, with associated impedances of 144-7 Ω and 91-4 Ω at 100–2000 MHz. The impedances vary with frequency as 1/ω over a 20:1 frequency range. The measured Q is greater than 50 in the VHF range.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::54efa6007f9e69c02832df9d1659da9d https://doi.org/10.1109/mwsym.2009.5165907 Zobrazit plný text záznamu