Scanning probes in nanostructure fabrication
| Autor: | Ivo W. Rangelow, Tzvetan Ivanov, Steve Lenk, Marcus Kaestner, Tihomir Angelov, Andreas Schuh, N. Nikolov, Manuel Hofer, Mathias Holz, Matthias Budden, Alexander Reum, Ahmad Ahmad, Yana Krivoshapkina, Elshad Guliyev, Jens-Peter Zoellner |
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| Rok vydání: | 2014 |
| Předmět: |
Materials science
Cantilever Process Chemistry and Technology Nanotechnology Piezoresistive effect Noise floor Surfaces Coatings and Films Electronic Optical and Magnetic Materials Nanolithography Deflection (engineering) Materials Chemistry Miniaturization Electrical and Electronic Engineering Actuator Instrumentation Lithography |
| Zdroj: | Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena. 32:06F101 |
| ISSN: | 2166-2754 2166-2746 |
| Popis: | Scanning probes have enabled modern nanoscience and are still the backbone of today's nanotechnology. Within the technological development of AFM systems, the cantilever evolved from a simple passive deflection element to a complex microelectromechanical system through integration of functional groups, such as piezoresistive detection sensors and bimaterial based actuators. Herein, the authors show actual trends and developments of miniaturization efforts of both types of cantilevers, passive and active. The results go toward the reduction of dimensions. For example, the authors have fabricated passive cantilever with a width of 4 μm, a length of 6 μm and thickness of 50–100 nm, showing one order of magnitude lower noise levels. By using active cantilevers, direct patterning on calixarene is demonstrated employing a direct, development-less phenomena triggered by tip emitted low energy ( |
| Databáze: | OpenAIRE |
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